Design and Fabrication of Compact Load Sensor Using AT-Cut Quartz Crystal Resonators(Mechanical Systems)

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  • ATカット水晶振動子による小型荷重センサの設計と製作(機械力学,計測,自動制御)
  • ATカット水晶振動子による小型荷重センサの設計と製作
  • AT カット スイショウ シンドウシ ニ ヨル コガタ カジュウ センサ ノ セッケイ ト セイサク

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Abstract

The load sensor with AT-cut quartz crystal resonator has the characteristic that the resonant frequency changes by the external force, which achieves high sensitivity, high-speed response, and wide measurement range by a simple structure. Also it has the superior feature in the temperature and frequency stability. On the other hand, the quartz crystal resonator had been hardly applied to a force measurement because of low degree of mechanical characteristic, that is, it is weak to the impact, bend, and tension. The objective of this study is to construct the sensor mechanism that safely maintain the quartz crystal resonator for the external force with flat structure. We designed and analyzed a novel retention mechanism of the quartz crystal resonator for the flat structure. The size of the retention mechanism is 6.0mm×5.0mm×4.4mm. The sensitivity of this sensor is 360Hz/N. Output fluctuation of the sensor was less than 0.05ppm when the static pressure of 1.5MPa was applied. The proposed load sensor is small, sensitive and stable for static force measurement.

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