Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer

• SASAKI Minoru

  Tohoku University

• ISHIMORI Masahiro

  Tohoku University

• SONG JongHyeong

  Tohoku University

• HANE Kazuhiro

  Tohoku University

抄録

An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.

収録刊行物

• IEICE transactions on electronics

  IEICE transactions on electronics 90 (1), 147-148, 2007-01-01

  一般社団法人電子情報通信学会

キーワード

• micromirror
• tuning
• vertical comb
• wafer bending

詳細情報

• CRID: 1571698602462504320
• NII論文ID: 110007519571
• NII書誌ID: AA10826283
• ISSN: 09168524
• 本文言語コード: en
• データソース種別:
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