3403 光放射圧を利用したマイクロプローブによるナノ三次元座標測定に関する研究(G13 生産加工・工作機械,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

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  • 3403 Study of 3D coordinate measurement by using the micro-probe controlled by the optical radiation pressure

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A nano-coordinate measuring machine (nano-CMM) has been developed to achieve a measuring accuracy of 50 nm and a measuring volume of 10 mm^3. To meet these stringent requirements, a probe based on the laser trapping technique is employe d as a micro-probe. This paper describes the development of the nano-CMM system with a laser-trapping probe and also des cribes the performance of the probe via an assessment of the flatness and sphere. It is observed that our developed nano-coo rdinate measuring system can measure three-dimensional objects with estimated uncertainty of 335 nm (k = 2).

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