1115 マイクロ接触面積に対する引き離し力の定量化(マイクロトライボロジー,一般講演)

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  • 1115 The Measurement of Pull-off Force due to the Quantification of Micro Contact Area

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In air condition, to presume micro forces of micro devices and applications on the contacted area at the designing stage, we should be considerate surface forces between interactive contact surfaces. Therefore, we will find out pull-off forces associate with contact area and determine pull-off forces due to the contact area of micro glass-parts quantitatively. We propose a measurement method for evaluating the pull-off force related to the contacting area of micro glass parts in air and liquid cohesive condition. Using stainless steel cantilever with strong normal spring constant (=k_n), we have directly measured pull-off forces between glass substrates and glass micro parts, which were modified substrates using pure water. First, we conducted calibration of stainless steel cantilevers using load cell and obtained cantilever of k_n=1225N/m. Second, the pull-off forces were measured using micro glass parts of square in air condition and water film. The pull-off forces were 19.7μN, 24.9μN and 47μN at 0.04mm^2, 0.16mm^2 and 0.64mm^2, respectively in the dried substrate. On the contrary, when the substrates were modified using pure water and became dry during within one hour in air condition, the pull-off forces were 0.9mN, 1.26mN and 2mN at 0.04mm^2, 0.16mm^2 and 0.64mm^2 of contact areas, respectively. We found that the difference increased by above 45 times that of dried substrates, approximately. From these results, we think that pull-off force between contacted surfaces are affected remarkably by fur of water which generated by evaporation of water film in air condition.

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