C37 非球面マイクロレンズ金型のオンマシン表面性状計測システムの開発(OS-5 加工計測・評価)

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  • C37 Development on on-machine surface measurement system for non-spherical micro lens mold

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A novel surface measurement system has been developped in order to evaluate the process of fabricating micro lenses. White light interferometer is conventionally applied for the flat surface and sphreical surface of lens mold. However it is difficult to evaluate the non-spherical lens mold by using the white light interferometer. We propose light scattering method which applied the extended TIS model in order to evaluate a surface texture of a non-spherical microlens mold. In this report we describe the experiment result wihtch measure the surface roughness of flat Si wafer coated with Cu. The developed system can detect scattered light pattern from the surface, and the roughness is agreed with theoritical model of TIS.

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