919 Amplitude and Phase Correction Method for Dynamic Measurements by Optical Lever AFM : Correction of Mechanical Characteristics of Interaction between Tip and Sample

• SHIMIZU Yoshitaka

  Tottori University

• MATSUOKA Hiroshige

  Tottori University

• FUKUI Shigehisa

  Tottori University

Bibliographic Information

Other Title

• 919 光てこAFMのダイナミック計測における振動振幅・位相の補正手法の研究 : チップ-試料間相互作用の機械特性の補正(模索潤滑設計IV)

Journal

• The Proceedings of Conference of Chugoku-Shikoku Branch

  The Proceedings of Conference of Chugoku-Shikoku Branch 2009.47 (0), 325-326, 2009

  The Japan Society of Mechanical Engineers

Keywords

• Atomic Force Microscope
• Ultrahigh Accuracy Measurement
• Dynamic Measurement
• Cantilever
• Forced Vibration
• Optical Lever Method
• Interaction between the tip and the sample
• Spring constant
• Damping Coefficient

Details

• CRID: 1390282680838131840
• NII Article ID: 110007723613
• DOI: 10.1299/jsmecs.2009.47.325
• ISSN: 24242764
• Web Site: https://www.jstage.jst.go.jp/article/jsmecs/2009.47/0/2009.47_325/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles