2P2-F14 外骨格型マイクロロボットに関する研究 : その1:積層組立プロセスSTAMP(医療・福祉ロボティクス・メカトロニクス)

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  • 2P2-F14 Study on Exoskeletal Microrobots : Part 1:Stacked Microassembly Process (STAMP)

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Development of fabrication technology made it feasible to fabricate micro order structures. Those technologies include machining, MEMS (Micro Electro Mechanical System) and laser fabrication. In micro-world, assembly becomes especially a crucial problem. We have developed an easy and fast assembly process of microparts called STAMP (Stacked Microassembly Process). In this process, three-dimensional structural object is fabricated by stacking up two-dimensional layers and micro-structures are cut apart after all the assembly is completed. Here, as an example, we have fabricated a model of stag beetle. Two-dimensional layer parts are fabricated by SU-8 photolithography and electroplating. Stacked parts are bolted together using micro-rivets.

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