J0402-1-4 フラーレン薄膜を用いた超高周波振動子の振動特性([J0402-1]超音波計測・解析法の新展開(1))

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  • J0402-1-4 Vibrational Property of Ultrahigh Frequency Resonator with Fullerene Thin Film

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Our research aims to develop an ultrahigh frequency resonator with high Q value to realize high sensitivity mass detective sensor for an application as a biosensor. A nano thin film deposited on a substrate is used as an oscillator, and we add a fullerene layer between a film and a substrate to prevent that vibrational energy leaks to a substrate. Ultrahigh frequency oscillation was generated in a Pt film deposited on a Si substrate using Picosecond laser ultrasound method, and resonance frequency and Q value were measured. As the results, we confirmed that adding a fullerene layers can increase Q value, and it has potential to improve the sensitivity of the mass detective sensor.

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