イオン液体を用いたSEMの新規観察法の開発  [in Japanese] Development of a novel SEM observation using an ionic liquid  [in Japanese]

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Author(s)

Abstract

Ionic liquid is a kind of salt as a liquid even at room temperature. Because of their unique properties such as negligible vapor pressure at room temperature and high ionic conductivity, they have been attention for widely applications even under vacuum conditions. In this study, we investigated the ionic liquid for treatment of insulating SEM samples. Ionic liquid was found to put electrical conductivity to the samples similar to a metal or carbon coating.

Journal

  • The journal of the Japanese Society for Dental Materials and Devices

    The journal of the Japanese Society for Dental Materials and Devices 30(5), 349, 2011-09-25

    The Japanese Society for Dental Materials and Devices (JSDMD)

References:  3

  • <no title>

    ISHIGAMI Y.

    Microscopy Res Technique 74, 415-420, 2011

    Cited by (1)

  • <no title>

    KAWAI K.

    Langmuir 27, 7353-7356, 2011

    Cited by (1)

  • <no title>

    ABE S.

    J Surf. Sci Nanotechnol 9, 80-84, 2011

    Cited by (2)

Codes

  • NII Article ID (NAID)
    110008790572
  • NII NACSIS-CAT ID (NCID)
    AA12452694
  • Text Lang
    JPN
  • Article Type
    SHO
  • ISSN
    18844421
  • Data Source
    CJP  NII-ELS 
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