S134014 大面積電子ビーム照射による凸形状変化の高精度予測([S134]先進特殊加工技術)

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  • S134014 Precise Prediction of Shape Change at Convex Tip by Large-area EB Irradiation

抄録

In large-area EB irradiation method developed recently, high-energy density of electron beam can be obtained without focusing the beam, and the electron beam with a maximum diameter 60 mm can be irradiated to workpiece surface. It was confirmed that the convex corner tip of workpiece was rounded with preferential material removal at the tip, which would deteriorate the shape accuracy. In this study, the shape changes of convex corner were experimentally investigated by SEM observation of the cross sections. Also, the electron concentration at the edge of convex shape was investigated by using electron track analysis. Moreover, unsteady heat conduction analysis at the convex corner was done with considering the EB concentration at the tip and the electron penetration effect into the surface. As a result, it was clarified that the convex corner edge was preferentially removed by large-area EB irradiation, and the curvature radius of the edge increased with the number of irradiation. Furthermore, the shape changes of convex corner were precisely predicted by the unsteady heat conduction analysis with considering the temporal material removal and electron beam concentration.

収録刊行物

  • 年次大会

    年次大会 2013 (0), _S134014-1-_S134014-5, 2013

    一般社団法人 日本機械学会

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