書誌事項
- タイトル別名
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- C07 Fundamental Study on Planarization of Si wafer by using Tiles Structured Polishing Pad
抄録
In this study, the fundamental material removal characteristics by using tiles structured polishing pad containing diamond abrasives have been investigated. A series of polishing tests has been carried out and the fundamental material removal characteristics have been discussed. It has been shown that the removal rate increases as polishing pressure increases. However polished surface roughness does not depend on the polishing pressure. Moreover, it has not been observed a large scale fracture on finished surface.
収録刊行物
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- 生産加工・工作機械部門講演会 : 生産と加工に関する学術講演会
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生産加工・工作機械部門講演会 : 生産と加工に関する学術講演会 2012.9 (0), 141-142, 2012
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390282680876376448
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- NII論文ID
- 110009937889
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- ISSN
- 24243094
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可