E36 超音波援用固定砥粒加工による石英ガラスのポリシング(OS7 研削・砥粒加工(3))

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  • E36 Fixed-abrasive dry polishing of fused silica in conjunction with ultrasonic vibrations

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Ultrasonic vibration can enhance machining perforn!ance in the grinding of hard-brittle materials, which is applied to the polishing of fused silica glass. Here we combined ultrasonic vibration with fixed-abrasive polishers. The experimental results evidence that material removal rate can be increased considerably upon the superimposition of ultrasonic vibration and that the greatest material removal rate is achieved when vibration is elliptical. The results of EDS, FI-IR and XRD suggest that material removal mechanism in dry polishing of fused silica differs from traditional polishing with aqueous fluids.

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