B10 集束イオンビーム加工した単結晶ダイヤモンド工具の改質とその切削加工特性(OS12 ナノ加工と表面機能(2)) [in Japanese] B10 Improvement and its machining performance of single-crystal diamond tools irradiated by a focused ion beam [in Japanese]
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We describe a technique to improve diamond cutting tools used in nanometer- and micrometer-scale machining and formed via focused-ion-beam (FIB) micromachining. Although FIB irradiation is an effective means of fabricating arbitrary miniature shapes in diamond cutting tools, FIB irradiation induces a non-diamond phase, as well as Ga ion implantation, in the irradiated area. This adversely affects the performance of the ultra-precision machining process, especially in terms of tool life and the quality of the machined surface. To eliminate the affected layer, we applied heat-treatment techniques and investigated the optimum thermal profiles. A temperature of 500℃ applied to the cutting tool provided optimal machining of nickel phosphorus. The tool life was significantly improved, and a tool life similar to that of a non-irradiated diamond tool was obtained. The quality of the machined surface was also improved markedly owing to superior tool wear and adhesion resistance.
- The Proceedings of The Manufacturing & Machine Tool Conference
The Proceedings of The Manufacturing & Machine Tool Conference 2014.10(0), 83-84, 2014
The Japan Society of Mechanical Engineers