J1130106 空気圧ベローズを用いた3自由度微動ステージの超精密位置決め([J113]次世代アクチュエータシステム)

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  • J1130106 Ultra-precision Positioning Fine Motion Stage with 3 Degrees of Freedom Driven by Pneumatic Bellows

抄録

The demand for ultra precise positioning of nanometer-order is increasing with the progress of nanotechnology in semiconductor industry.Previously we developed the one axis stage driven by pneumatic bellows for such a demand, and realized ultra precise positioning and long stroke.However, not only a one axis stage, but also a stage with multiple degrees of freedom is often demanded in semiconductor industry. Previously, we proposed to unitize a pneumatic bellows and an elastic hinge guide and developed 3 degree-of-freedom fine motion stage using proposed actuator units of three. In this paper, positioning characteistics of this stage are examined. As a result, positioning accuracy was 50[nm] or less at both settling and tracking control. It is confirmed that the fine motion stage driven by pneumatic belows has gooog positioning accuracy.

収録刊行物

  • 年次大会

    年次大会 2014 (0), _J1130106--_J1130106-, 2014

    一般社団法人 日本機械学会

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