2307 Nano-level measurement of cylindrical surfaces by scanning laser interferometry with wide field of view

• NITTA Isami

  Niigata University

• SAKUMA Shunsuke

  Niigata University

• TSUKIYAMA Yosuke

  Niigata University

Bibliographic Information

Other Title

• 2307 広視野レーザ干渉計による円筒面のナノレベル形状計測(トライボロジー(4))

Journal

• The Proceedings of the Machine Design and Tribology Division meeting in JSME

  The Proceedings of the Machine Design and Tribology Division meeting in JSME 2014.14 (0), 173-176, 2014

  The Japan Society of Mechanical Engineers

Keywords

• laser interferometry
• laser scanning
• cylindrical surface
• nano measurement
• wide field of view

Details

• CRID: 1390282680869519744
• NII Article ID: 110009960026
• DOI: 10.1299/jsmemdt.2014.14.173
• ISSN: 24243051
• Web Site: https://www.jstage.jst.go.jp/article/jsmemdt/2014.14/0/2014.14_173/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles