5PM1-D-4 自立Cu/Al_2O_3積層薄膜の機械的特性評価(5PM1-D ナノ構造・材料の創製と評価)

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  • 5PM1-D-4 Evaluation of mechanical property of free-standing Cu/Al_2O_3 multilayer thin film

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The Mechanical property of free-standing Cu/Al_2O_3 multilayer thin film was investigated by a method of micro-bending test. The Cu and Al_2O_3 monolayer thin film and Cu/Al_2O_3 multilayer thin film were deposited on Si substrate by an electron beam deposition. Free-standing micro-beam specimens were fabricated using a focused ion beam system. The micro-bending tests were conducted using a nanoindenter. Young's moduli of free-standing thin films were estimated by FE analysis including indentation displacement. Young's moduli of Cu and Al_2O_3 films were relatively close to those of bulk material, and that of Cu/Al_2O_3 film with 20 layers was between Cu and Al_2O_3 films. On the other hand, the fracture strength of Cu/Al_2O_3 film with 20 layers was larger than that of Al_2O_3 film.

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