605 Whispering gallery modeを用いたマイクロ球の直径計測に関する研究(OS3 先進製造技術(3),研究討論セッション)

• 道畑 正岐

  阪大

• 川嵜 彬史

  阪大

• 足立 篤

  阪大

• 高谷 裕浩

  阪大

書誌事項

タイトル別名

• 605 Diameter measurement of microsphere using whispering gallery mode

抄録

This study proposes the new measurement method for the diameter of a microsphere, which utilizes the whispering gallery mode (WGM). WGMs are the light propagation mode, so it is necessary to determine the mode number to the obtained WGM wavelength for the accurate diameter measurement. Using wide wavelength bandwidth and polarization control, it was possible to identify the mode number of the detected WGMs, which was conformed by comparison with the theoretical values. Finally, the diameter measurement was implemented and the results were compared with other measurement instrument, revealing the performance of the proposed technique, accuracy was greater than 1 μm and resolution was less than 1 nm.

収録刊行物

• 関西支部講演会講演論文集

  関西支部講演会講演論文集 2015.90 (0), 218-221, 2015

  一般社団法人 日本機械学会

詳細情報

• CRID: 1390282680830251648
• NII論文ID: 110009966048
• DOI: 10.1299/jsmekansai.2015.90.218
• ISSN: 24242756
• Web Site: https://www.jstage.jst.go.jp/article/jsmekansai/2015.90/0/2015.90_218/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可