C-12-24 Evaluation of a Digital control for an Electrostatic Micro-actuator with CMOS circuit

• Maruyama Satoshi

  VLSI Design and Education Center, The University of Tokyo

• Ikeda Makoto

  Dept. of Engineering. The University of Tokyo

Bibliographic Information

Other Title

• C-12-24 CMOS混載型静電マイクロミラーのデジタル制御方式の評価(C-12.集積回路,一般セッション)

Journal

• Proceedings of the IEICE General Conference

  Proceedings of the IEICE General Conference 2016 (2), 97-, 2016-03-01

  The Institute of Electronics, Information and Communication Engineers

Details

• CRID: 1572543027357807744
• NII Article ID: 110010026179
• NII Book ID: AN10471452
• Text Lang: ja
• Data Source:
  • CiNii Articles