1203 High-quality and Reliable Removal Method of ZnO by ns Pulsed Fiber Laser with Square Core Optical Fiber

• NISHI Norio

  Kataoka Corporation

• OKAMOTO Yasuhiro

  Okayama University

• OKADA Akira

  Okayama University

• NAKASHIBA Shin-ichi

  Kataoka Corporation

• SAKAGAWA Tomokazu

  Kataoka Corporation

抄録

Effects of edge intensity distribution in top-hat mode on removal characteristics of zinc oxide film was experimentally investigated by a nano-second pulsed fiber laser. The usage of mask could change the edge intensity distribution of laser beam. The combination of singlet lens and slit mask could perform the gradual edge and the sharp edge intensity distributions in parallel and perpendicular directions to a scanning line, respectively. This edge intensity combination could achieve high-quality removal with narrow damaged regions around the scribed grooves and reliable removal with stable electrical insulation states at more than a proper overlap rate.

収録刊行物

• Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21

  Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2015.8 (0), _1203-1_-_1203-6_, 2015

  一般社団法人 日本機械学会

キーワード

• ZnO
• Square core optical fiber
• Nano-second pulsed fiber laser
• Mask
• Intensity distribution

詳細情報

• CRID: 1390282680877877632
• NII論文ID: 110010045275
• DOI: 10.1299/jsmelem.2015.8._1203-1_
• ISSN: 24243086
• Web Site: https://www.jstage.jst.go.jp/article/jsmelem/2015.8/0/2015.8__1203-1_/_pdf
• 本文言語コード: en
• データソース種別:
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