29pm1-E-1 単一層による多軸熱マイクロアクチュエータのための梁の形状設計

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  • 29pm1-E-1 Design of Beams for Multi-Axis Thermal Micro Actuator Using Single Layer

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We measured out-of-plane and in-plane deformations of beams in order to design beam shape which can deform out-of-plane or in-plane on a same substrate for multi-axis thermal actuator using single layer. We used buckling for deformation of beams, because buckling can change the direction between input and output deformations. Direction of deformation of beams can be changed by shape of beams. Therefor we measure deformation of curved beams with initial deflection. We fabricated and measured out-of-plane and in-plane deformations of the curved beams with 1000 μm in length, 20 μm in width, 5 μm in thickness and an initial deflection. As a result, curved beams with 0, 10, 100 μm in initial deflection deformed only in out-of-plane direction, in both out-of-plane and in-plane directions, and only in in-plane direction, respectively. This result shows we can control direction of deformation by designing initial deflection.

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