J2210301 微細ホールパターンの形態変化による空洞形成過程のシミュレーション

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タイトル別名
  • J2210301 Simulation of Void Formation by Shape Transformation of Hole Patterns

抄録

We have studied simulation method for surface-diffusion-driven evolution of high-aspect-ratio hole patterns. In order to reproduce the topological changes such as closure of hole openings and pinch-off of voids in the evolution of high-aspect-ratio hole patterns by simulation, phase field model based on Cahn-Hilliard equation with degenerate mobility is used. We show that our simulation reproduces well the observed evolution of high-aspect-ratio hole patterns. We also reveal the capability of the surface-diffusion-driven evolution to create different kinds of 3D micro-structures such as beams and cantilevers using this simulation.

収録刊行物

  • 年次大会

    年次大会 2015 (0), _J2210301--_J2210301-, 2015

    一般社団法人 日本機械学会

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