S1320203 光放射圧プローブ精密定在場スケールによるマイクロ自由曲面形状のスキャニング測定

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  • S1320203 Scanning Measurement of Micro Free Form Surface using the Interpolated Standing Wave Scale Generated by an Optically Trapped Probe

抄録

Three-dimensional metrology is demanded to inspect the manufacturing performance of miniaturized products with nano/micro scale. To satisfy the specific requirements for coordinate metrology, we have developed an optically trapped probe, whose principle is based on single beam trap of a microsphere in air. In this paper, as a scanning measurement method of a micro free form surface, the novel nano-profile measurement technique by scanning an optically trapped probe is proposed, which is used as a sensor to read a standing wave scale (SWS) based on the interpolation method. An axial position of the microprobe sphere was measured using a chromatic confocal system to interpolate the SWS with high accuracy and high resolution. The length and the resolution of the interpolated SWS could be achieved 3 μm and 20 nm, respectively. In order to verify the validity of the proposed scanning measurement technique, the surface profile measurement of a glass small lens with accuracy higher than 50 nm was demonstrated.

収録刊行物

  • 年次大会

    年次大会 2015 (0), _S1320203--_S1320203-, 2015

    一般社団法人 日本機械学会

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