GS1106 ナノインデンテーション法による多層薄膜の硬さ評価 (第3報)

DOI Web Site

書誌事項

タイトル別名
  • GS1106 Hardness Evaluation of Multilayer Thin Films by Nanoindentation Method (3rd Report)

抄録

It's important to make the mechanical characteristics of a film clear. Because a semiconductor device and a machine are because it'll be small, and becomes thin. The way to measure the hardness of the film is a hardness test. But the hardness of the film can't be gauged with a conventional hardness test. It's because the test load is too big to a film. Nanoindentation can measure the small range and the hardness of the film by the very small test load. The hardness which is one of mechanical characteristics of multilater thin films is made clear using Nanoindentation by this research.

収録刊行物

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ