706 Nano-scale cutting by Atomic Force Microscope

• DEI Daisuke

  University of Tsukuba

• KASAGAWA Masataka

  Keio University

• ASHIDA Kiwamu

  National Institute of Advanced Industrial Science and Technology

• YABUNO Hiroshi

  University of Tsukuba

Bibliographic Information

Other Title

• 706 原子間力顕微鏡を利用したナノスケール加工(OS7-(2),OS7 オーガナイズドセッション≪精密/微細加工と評価≫)

Abstract

In this study, vibrational assisted nano-scale cutting is performed by Atomic Force Microscope (AFM). The condition for cutting was classified observing the vibration behavior of the microcantilever according to the distance between the tip of the cantilever and the sample by measuring "dynamic forcecurve". Effectiveness of vibration was investigated by comparison of static cutting with vibration-assisted cutting.

Journal

• The Proceedings of Ibaraki District Conference

  The Proceedings of Ibaraki District Conference 2015.23 (0), 71-72, 2015

  The Japan Society of Mechanical Engineers

Keywords

• AFM
• vibration-assisted machining
• forced vibration
• force curve

Details

• CRID: 1390282680831237760
• NII Article ID: 110010054850
• DOI: 10.1299/jsmeibaraki.2015.23.71
• ISSN: 24242683
• Web Site: https://www.jstage.jst.go.jp/article/jsmeibaraki/2015.23/0/2015.23_71/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed