Preparation and characterization of PZT thin films on ITO/glass substrate by CSD

• Ohno, Tomoya

• Fujimoto, Masayuki

• Suzuki, Hisao

Abstract

This paper describes the deposition of PZT thin films on soda-lime glass substrate with ITO bottom electrode by CSD (Chemical Solution Deposition). The transmittance of the obtained PZT thin film on ITO/glass substrate was about 60 % in the visible light region. The deposited transparent PZT thin film exhibited the ferroelectricity of P_r = 36.3 μC/cm^2 and E_c = 71.3 kV/cm. In addition, the piezoelectric property of the resultant PZT thin film was relatively large and exhibited the measured effective d_33 of 120 pC/N after the polarization.

application/pdf

Journal

• Key Engineering Materials

  Key Engineering Materials 301 41-44, 2006

  Trans Tech Publications

Details

• CRID: 1050564288760545152
• NII Article ID: 120000786891
• Web Site: https://kitami-it.repo.nii.ac.jp/records/6828
• Text Lang: en
• Article Type: journal article
• Data Source:
  • IRDB
  • CiNii Articles
  • KAKEN