Pulse modulation for plasma parameter control and optimization of volume H- ion source

• 福政, 修

• Shinoda, Masahiro

抄録

Pulse modulation of a negative ion volume source was investigated, both with and without a magnetic filter for various operating conditions. Without a magnetic filter, afterglow negative ion peak is observed, which was reported by some authors. Variation of afterglow peak was discussed as a function of gas pressure, discharge power, and extraction voltage. With a magnetic filter, on the other hand, there is no remarkable afterglow peak and the negative ion current during the discharge pulse exceeds all the afterglow currents for the present experimental conditions. Finally, comparison of afterglow negative ion peak (no magnetic filter case, i.e., temporal filter) with negative ion current during the discharge pulse (with magnetic filter case, i.e., spatial filter) was discussed.

収録刊行物

• Review of Scientific Instruments

  Review of Scientific Instruments 69 (2), 938-940, 1998-02

  American Institute of Physics

キーワード

• 電気電子工学

詳細情報

• CRID: 1050001337454177024
• NII論文ID: 120000864135
• Web Site: https://petit.lib.yamaguchi-u.ac.jp/89
• 本文言語コード: en
• 資料種別: journal article
• データソース種別:
  • IRDB
  • CiNii Articles