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Journal

  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

    Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 27(2), 701-704, 2009

    American Institute of Physics

Cited by:  1

Codes

  • NII Article ID (NAID)
    120001756786
  • NII NACSIS-CAT ID (NCID)
    AA10804928
  • Text Lang
    ENG
  • Article Type
    Journal Article
  • ISSN
    1071-1023
  • Data Source
    CJPref  IR 
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