Strain distribution of Si thin film grown on multicrystalline-SiGe with microscopic compositional distribution

• 中嶋 一雄

収録刊行物

• Journal of Applied Physics

  Journal of Applied Physics 92 (12), 7098-7101, 2002

  American Institute of Physics

詳細情報

• CRID: 1571980077541575424
• NII論文ID: 120002338155
• ISSN: 00218979
• Web Site: http://hdl.handle.net/10097/47273
• 本文言語コード: en
• データソース種別:
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