Profilometry with line-field Fourier-domain interferometry
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Line-field Fourier-domain interferometry that is capable of a fast three-dimensional (3-D) shape measurement is proposed. This system is constructed from a combination of a conventional Fourier-domain interferometer and a one-dimensional imaging system. This system directs a line-shaped focus onto a specimen, and a two-dimensional shape can be calculated from a single-shot image of the CCD camera without any mechanical scan. An aspherical mirror and a Japanese coin are presented as a 3-D shape measurement example.This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-3-695. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
- Optics Express
Optics Express 13(3), 695-701, 2005-02
Optical Society of America