Measurements of Thin-Film Elastic Constants

• HIRAO Masahiko

  Graduate School of Engineering Science, Osaka University

• OGI Hirotsugu

  Graduate School of Engineering Science, Osaka University

Bibliographic Information

Other Title

• 薄膜弾性定数の測定
• ハクマク ダンセイ テイスウ ノ ソクテイ

Journal

• TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A

  TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A 75 (752), 397-403, 2009

  The Japan Society of Mechanical Engineers

Keywords

• Elastic Constants
• Thin Films
• Anisotropy Microstructure
• Ultrasound
• Resonance

Details

• CRID: 1390001204477043072
• NII Article ID: 110007226477
• NII Article ID: 120004837083
• NII Book ID: AN0018742X
• DOI: 10.1299/kikaia.75.397
• ISSN: 18848338
• ISSN: 03875008
• HANDLE: 11094/2878
• NDL BIB ID: 10285155
• Web Site: http://id.ndl.go.jp/bib/10285155
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I10285155
• Web Site: https://www.jstage.jst.go.jp/article/kikaia1979/75/752/75_KJ00005579066/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • IRDB
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN