Elastic Constant and Microstructure of Oxide Thin Films Studied by Brillouin Oscillation

• SHAGAWA Tomohiro

  大阪大学大学院基礎工学研究科

• OGI Hirotsugu

  Graduated School of Engineering Science, Osaka University

• NAKAMURA Nobutomo

  大阪大学大学院基礎工学研究科

• HIRAO Masahiko

  大阪大学大学院基礎工学研究科

• ODAKA Hidefumi

  旭硝子(株)

• KIHARA Naoto

  旭硝子(株)

Bibliographic Information

Other Title

• ブリルアン振動を用いた酸化物薄膜の弾性定数測定と組織評価
• ブリルアン シンドウ ヲ モチイタ サンカブツ ハクマク ノ ダンセイ テイスウ ソクテイ ト ソシキ ヒョウカ
• ブリルアン シンドウ オ モチイタ サンカブツ ハクマク ノ ダンセイ テイスウ ソクテイ ト ソシキ ヒョウカ

Abstract

This paper studies the elastic constant and microstructure of amorphous SiO_2 (a-SiO_2) thin films deposited on Si substrates. a-SiO_2 thin films were prepared by the reactive sputtering with a Si target in the argon/oxygen mixture gas. We measured the Brillouin-oscillation frequency using a femtosecond pump-probe method. We determined the longitudinal-wave elastic constant from the measured frequency and the refractive index measured by the thin-film ellipsometry. The results show that the elastic constant of the a-SiO_2 thin film highly depend on the microstructure and microcracks. The micromechanics model was developed to explain the decrease of the stiffness with thin pancake-shaped microcracks, which were randomly distributed in the a-SiO_2 matrix. This study demonstrates that the Brillouin oscillation technique is an effective tool for evaluation of not only acoustic properties but also reliability of transparent materials.

Journal

• TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A

  TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A 75 (749), 72-78, 2009

  The Japan Society of Mechanical Engineers

Keywords

• Nondestructive Inspection
• Elasticity
• Reliability
• Micromechanics
• Brillouin Oscillation
• Sound Velocity
• Oxide Thin Films

Details

• CRID: 1390282679453724160
• NII Article ID: 110007044771
• NII Article ID: 120004837122
• NII Book ID: AN0018742X
• DOI: 10.1299/kikaia.75.72
• ISSN: 18848338
• ISSN: 03875008
• HANDLE: 11094/2917
• NDL BIB ID: 9798881
• Web Site: http://id.ndl.go.jp/bib/9798881
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9798881
• Web Site: https://www.jstage.jst.go.jp/article/kikaia1979/75/749/75_KJ00005186488/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • IRDB
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed