Morphology change from nanocrack into periodic pore array formed by femtosecond laser pulses

Access this Article

Search this Article

Abstract

Defects inside single crystals are an important concern because they directly affect the physical or chemical properties of the material, especially in sapphire used as substrates for semiconductors. We have investigated the thermally activated transformations of nanometer-scale cracks and phase transitions inside sapphire by femtosecond laser irradiation and successive heat treatments. The nanocracks transformed into periodic arrays of pores and dislocations that aligned along the {1Ī02} planes after heat treatments above 1300 °C. The amorphous phase at the focal point recovered into the initial single crystalline phase after the heat treatments. Our study provides useful information on the recovery behavior of nanometer-scale defects in a single crystal.

Journal

  • JOURNAL OF APPLIED PHYSICS

    JOURNAL OF APPLIED PHYSICS 109(1), 2011-01-01

    American Institute of Physics

Codes

  • NII Article ID (NAID)
    120004920371
  • NII NACSIS-CAT ID (NCID)
    AA00693547
  • Text Lang
    ENG
  • Article Type
    journal article
  • ISSN
    0021-8979
  • Data Source
    IR 
Page Top