Fabrication of a meniscus microlens array made of anodic alumina by laser irradiation and electrochemical techniques

• Kikuchi, Tatsuya

• Wachi, Yuhta

• Takahashi, Taka-aki

• Sakairi, Masatoshi

• Suzuki, Ryosuke O.

抄録

An anodic alumina microlens array was fabricated by laser irradiation and electrochemical techniques. An aluminum specimen covered with a porous oxide film was irradiated with a pulsed Nd-YAG laser, and then electropolished to dissolve the aluminum substrate. A well-defined semi-elliptical micropore was formed on the aluminum by electropolishing. The immersion of the electropolished specimen in a CrO3/H3PO4 solution resulted in the dissolution of the remaining anodic oxide film. Subsequent re-anodizing enabled the formation of a characteristic meniscus-shaped oxide film on the micropore. A microlens array made of the thin anodic alumina film, which showed flexibility and heat resistance, was successfully fabricated by the lift-off of the anodic oxide. (C) 2013 Elsevier Ltd. All rights reserved.

収録刊行物

• Electrochimica Acta

  Electrochimica Acta 94 269-276, 2013-04-01

  Elsevier

キーワード

• Aluminum
• Anodizing
• Laser irradiation
• Electropolishing
• Microlens array

詳細情報

• CRID: 1050001339013421568
• NII論文ID: 120005322416
• DOI: 10.1016/j.electacta.2013.02.020
• HANDLE: 2115/53116
• ISSN: 00134686
• Web Site: https://api.elsevier.com/content/article/PII:S0013468613002399?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0013468613002399?httpAccept=text/plain
• 本文言語コード: en
• 資料種別: journal article
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