Properties of low-temperature grown InAs and their changes upon annealing
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Abstract
As-grown and annealed samples of InAs layers grown by MBE at 150-350℃ were characterized by electron probe microanalysis (EPMA), high resolution X-ray diffraction (HRXRD), Hall measurements, and secondary ion mass spectrometry (SIMS). EPMA revealed that the As mole fractions in the layers grown at 150-200 ℃ are higher by about 0.5 % than those in the layers grown at 300-350 ℃. HRXRD measurements revealed that the layers grown at 150-200 ℃ have larger lattice spacings than the InAs substrate by about 0.02 %. Hall measurements revealed that the free-electron concentration in the layer grown at 200 ℃ is as high as 1.4×10^<19> cm^<-3> while such a high concentration of impurities cannot be detected by SIMS. Upon annealing at higher temperatures than 250 ℃, both the lattice spacing and the free-electron concentration of the layer grown at 200 ℃ were observed to decrease. These phenomena can be reasonably attributed to antisite As.
Journal
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- Journal of crystal growth
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Journal of crystal growth 301-302 256-259, 2006
Elsevier
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Details 詳細情報について
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- CRID
- 1050845764139300736
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- NII Article ID
- 120005587463
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- NII Book ID
- AA00696341
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- ISSN
- 00220248
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- Web Site
- http://ir.lib.shimane-u.ac.jp/24332
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- Text Lang
- en
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- Article Type
- journal article
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- Data Source
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- IRDB
- CiNii Articles