多角バレルスパッタリング装置を用いたオキシ窒化リン酸リチウム（LiPON）電解質の調製

• 西澤 秀基

• 井上 光浩

• 阿部 孝之

書誌事項

タイトル別名

• タカク バレルスパッタリング ソウチ オ モチイタ オキシ チッカ リンサン リチウム(LiPON)デンカイシツ ノ チョウセイ
• Preparation of Lithium Phosphorus Oxynitride (LiPON) Electrolytes Using the Polygonal Barrel-Sputtering System

抄録

Lithium phosphorous oxynitride (LiPON) electrolytes for solid-state lithium batteries were prepared using the polygonal barrel-sputtering system. When sputtering was carried out at an N2 gas pressure of 4 Pa and an AC power of 100 W for 120 min using a Li3PO4 target plate, a worm-like deposition was formed on the planer silicon substrate. An N1s peak was observed at around 400 eV in the X-ray photoelectron spectroscopy survey spectrum of the sputtered sample. This N1s peak was deconvoluted into two peaks: one at 397.4 eV ascribed to P-N<P bond formation and the other at 399.0 eV reflecting P-N=P bond formation. Based on these data, the formed deposit was assigned to LiPON. The ion conductivity of the prepared LiPON was evaluated by impedance measurements. A semicircle was obtained in the Cole-Cole plot, from which the ion conductivity was determined to be 1.8 ×10-6 S cm-2, close to those of typical LiPON films in the Literature (1.7 × 10-6-6.4 × 10-6 S cm-2). Thus, LiPON films can be prepared by the polygonal barrel-sputtering system.

収録刊行物

• 富山大学研究推進機構水素同位体科学研究センター研究報告

  富山大学研究推進機構水素同位体科学研究センター研究報告 35 45-50, 2016-09-30

  富山大学研究推進機構水素同位体科学研究センター

キーワード

• ZP8

詳細情報

• CRID: 1390572174760711552
• NII論文ID: 120005868676
• NII書誌ID: AA11841872
• ISSN: 13463675
• ISSN: 24335908
• DOI: 10.15099/00016653
• HANDLE: 10110/00016653
• NDL書誌ID: 027685576
• Web Site: https://toyama.repo.nii.ac.jp/records/14156
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I027685576
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • IRDB
  • NDL
  • CiNii Articles
• 抄録ライセンスフラグ: 使用可