A thermocouple-based remote temperature controller of an electrically-floated sample for plasma CVD of nanocarbons with bias voltage

• Shimada, Toshihiro

• Miura, Takuya

• Xie, Wei

• Yanase, Takashi

• Nagahama, Taro

Abstract

We report an accurate and easy-to operate instrument for the temperature control of an electrically floated sample using a thermocouple in direct contact with it. The signal was transmitted via 2.45 GHz WiFi. We measured and analyzed the discrepancy between the thermocouple and a radiation thermometer for the plasma CVD of carbon nanomaterials under sample bias. A successful protection method from abnormal discharge in the plasma is also provided. (C) 2017 Elsevier Ltd. All rights reserved.

Journal

• Measurement

  Measurement 102 244-248, 2017-05

  Elsevier

Keywords

• Temperature measurement
• Plasma CVD
• Carbon nanomaterial
• Emissivity
• Pyrometer
• Thermocouple

Details

• CRID: 1050845763990815232
• NII Article ID: 120006626550
• DOI: 10.1016/j.measurement.2017.02.012
• HANDLE: 2115/73882
• ISSN: 02632241
• Web Site: https://api.elsevier.com/content/article/PII:S0263224117301070?httpAccept=text/plain
• Web Site: https://api.elsevier.com/content/article/PII:S0263224117301070?httpAccept=text/xml
• Text Lang: en
• Article Type: journal article
• Data Source:
  • IRDB
  • Crossref
  • CiNii Articles
  • KAKEN