Yield-aware decomposition for LELE double patterning

• 小平, 行秀

• Kohira, Yukihide

• 高橋, 篤司

• TAKAHASHI, Atsushi

抄録

identifier:oai:t2r2.star.titech.ac.jp:50236031

収録刊行物

• Proc. SPIE 9053, Design-Process-Technology Co-optimization for Manufacturability VIII, 90530T

  Proc. SPIE 9053, Design-Process-Technology Co-optimization for Manufacturability VIII, 90530T 1-10, 2014-03

詳細情報

• CRID: 1050292572161080320
• NII論文ID: 120006703278
• Web Site: http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100668909
• 本文言語コード: en
• 資料種別: conference paper
• データソース種別:
  • IRDB
  • CiNii Articles