多孔質セラミックス空洞表面へのカーボンナノチューブ成長方法の開発

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  • DEVELOPMENT OF GROWTH METHOD FOR CARBON NANOTUBES IN POROUS CERAMICS CAVITIES

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In order to optimize a growth method of carbon nanotubes (CNTs) in the Si/SiC porous ceramic cavities based on a chemical vapor deposition (CVD) method with the use of ferrocene as the catalyst precursor of the CNT growth, gas components to be generated during the ferrocene decomposition and their generation rates were investigated by infrared (IR) absorption spectrum analysis using Fourier transform infrared spectroscopy (FTIR). Comparisons of the CNTs grown at various temperatures for the sublimation and decomposition have indicated that the CNT film grown in the case that the sublimation and decomposition temperatures were set to 220℃ and 700℃, respectively, exhibits the maximum thickness and uniformity. Hydrocarbon species were detected by the FTIR during the decomposition of ferrocene and catalytic iron particles generated per unit time increase as the ferrocene sublimation / decomposition temperature increases. In case that the sublimation temperature was set to 300℃, it was too thick CNT carpets grown on the outer surface of substrate for the CVD gas including the ferrocene vapor to penetrate the CNT carpet, which leads to non-uniform and thin CNT arrays grown on the inside cavities within the porous substrate.

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