Ambient analysis of liquid materials with Wet-SIMS

• 瀬木, 利夫

• 草刈, 将一

• 藤井, 麻樹子

• 青木, 学聡

• 松尾, 二郎

抄録

Secondary ion mass spectrometry (SIMS) is a method with high surface sensitivity that allows both elemental and molecular analysis. However, volatile liquid (wet) samples are difficult to measure using conventional SIMS, because samples must be dried and introduced into a high vacuum chamber. The mean free path of ions with energy in the keV range is very short in low vacuum and these ions cannot penetrate the surface. In contrast, ions in the MeV-energy range have high transmission capability in low vacuum and wet samples can be measured using heavy ions without dry sample preparation. Ion beams in the MeV-energy range also excite electrons near the surface and enhance the ionization of high-mass molecules and thus fragment-suppressed SIMS spectra of ionized molecules can be obtained. We have developed an ambient analysis system with secondary ion mass spectrometry for wet samples (Wet-SIMS) that operates from low vacuum to 30. kPa using MeV-energy heavy ion beams. The system is equipped with fine apertures that avoid vacuum degradation at both the primary beam incidence and the secondary ion measurement sides, even when the target chamber is filled with He gas at 30. kPa. Water evaporation was suppressed in a He atmosphere of 16.5. kPa and a solution of benzoic acid could be measured using MeV-energy heavy ions.

The 22nd International Conference on Ion Beam Analysis (IBA 2015)

収録刊行物

• Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 371 189-193, 2016-03-15

  Elsevier BV

キーワード

• SIMS
• Ambient analysis
• MeV-energy heavy ion
• Water

詳細情報

• CRID: 1050007846255785600
• NII論文ID: 120006810864
• ISSN: 0168583X
• HANDLE: 2433/245932
• 本文言語コード: en
• 資料種別: conference paper
• データソース種別:
  • IRDB
  • CiNii Articles