Profilometry with line-field Fourier-domain interferometry

• Endo, Takashi

• YASUNO, Yoshiaki

• Makita, Shuichi

• ITOH, Masahide

• Yatagai, Toyohiko

Abstract

This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-3-695. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

Journal

• Optics Express

  Optics Express 13 (3), 695-701, 2005-02

  Optica Publishing Group

Details

• CRID: 1050282677615222016
• NII Article ID: 120007137627
• ISSN: 10944087
• HANDLE: 2241/108136
• Web Site: https://tsukuba.repo.nii.ac.jp/records/21731
• Text Lang: en
• Article Type: journal article
• Data Source:
  • IRDB
  • CiNii Articles
  • KAKEN