Radiative Cooling Characteristics of Functionally Graded Silicon Suboxide Films Prepared by Magnetron Sputtering
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- Goto Takashi
- Institute for Materials Research, Tohoku University
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- Miyazaki Hidetoshi
- Institute for Materials Research, Tohoku University
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- Masumoto Hiroshi
- Institute for Materials Research, Tohoku University
Bibliographic Information
- Other Title
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- マグネトロンスパッタリング法により作製した傾斜機能亜酸化けい素膜の放射冷却特性
- マグネトロンスパッタリング法により作製した傾斜機能亜酸化ケイ素膜の放射冷却特性
- マグネトロンスパッタリングホウ ニ ヨリ サクセイ シタ ケイシャ キノウ アサンカ ケイソ マク ノ ホウシャ レイキャク トクセイ
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Abstract
Silicon suboxide (SiOx) could be a potential material for radiative cooling due to appropriate infra-red absorption at wave-length (λ) between 8 and 13 μm. In this study, SiOx films ranging from x=0.98 to 1.7 were prepared by magnetron sputtering using a SiO sintered body target. An SiO0.98 single layer film had a relatively sharp absorption peak at λ=10 μm. The obtained SiO0.98 film showed amorphous and a black-brown color. An optical band gap (Eg) of the SiO0.98 film was 3.6 eV, and the SiOx (x>1.4) film was transparent in the UV-visible range with a wide optical band gap (>4 eV). A functionally graded SiOx layers showed broader absorption from λ=8 to 13 μm, promising for radiative cooling.
Journal
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- Journal of the Japan Society of Powder and Powder Metallurgy
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Journal of the Japan Society of Powder and Powder Metallurgy 52 (11), 851-856, 2005
Japan Society of Powder and Powder Metallurgy
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Details 詳細情報について
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- CRID
- 1390282681285469184
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- NII Article ID
- 130000056256
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- NII Book ID
- AN00222724
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- ISSN
- 18809014
- 05328799
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- NDL BIB ID
- 7734220
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed