Crystal Morphology Analysis of Piezoelectric Ceramics Using Electron BackScatter Diffraction Method and Its Application to Multiscale Finite Element Analysis

Abstract

Microstructural crystal morphology, which affects strongly on macroscopic electromechanical behaviors of polycrystalline piezoelectric ceramics, was analyzed using electron backscatter diffraction method. We coated piezoelectric ceramics with amorphous osmium to defend against electrification caused by electron beam, and measured crystal orientations of 140×120 μm2 over region at 0.32 μm scanning interval. Then the obtained crystal orientations were applied to a multiscale finite element analysis to evaluate the relation with macroscopic mechanical and electrical properties. Especially, we investigated on finite element modeling conditions to sample crystal orientations, and presented a representative volume element of microstructure to compute the macroscopic homogenized properties and the microscopic localized responses.

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