A Proposition on Material Properties Estimation of Piezoelectric Thin Films Utilizing Dual-Points Concurrent Displacement Measurement
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- UETSUJI Yasutomo
- Dept. of Mech. Eng., Osaka Inst. of Tech.
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- OGAWA Ryota
- Dept. of Mech. Eng., Osaka Inst. of Tech.
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- KURAMAE Hiroyuki
- Dept. of Tech. Management, Osaka Inst. of Tech.
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- TSUCHIYA Kazuyoshi
- Dept. of Precision Eng., Tokai Univ.
Bibliographic Information
- Other Title
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- 2点同時変位測定に基づく圧電薄膜の材料特性評価法の提案
- 2点同時変位測定に基づく圧電導膜の材料特性評価法の提案
- 2テン ドウジ ヘンイ ソクテイ ニ モトズク アツデンドウマク ノ ザイリョウ トクセイ ヒョウカホウ ノ テイアン
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Abstract
A material properties estimation method was proposed for piezoelectric thin films fabricated on substrates. The proposed method can present piezoelectric strain constant d333 on basis of displacement difference between top and bottom points of specimen under external electric field with a disc-type electrode. In this paper, its availability was verified with finite element method. Thicknesses of piezoelectric thin film and substrate were changed and the mechanical and electrical behavior was computationally analyzed to get dual-points concurrent displacement. Then piezoelectric strain constant was estimated from the simultaneous equation in consideration of piezoelectric and Poisson's effects. As a result, the errors of the estimated values under static and dynamic electric fields were 1.1 % and 4.1%, respectively.
Journal
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- Journal of the Society of Materials Science, Japan
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Journal of the Society of Materials Science, Japan 58 (10), 815-820, 2009
The Society of Materials Science, Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390001205419890432
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- NII Article ID
- 130000133209
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- NII Book ID
- AN00096175
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- ISSN
- 18807488
- 05145163
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- NDL BIB ID
- 10468227
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed