インデンテーション法によるＤＬＣ膜の力学特性の評価および基材の影響

• 中山 朝之

  青山学院大学大学院

• 坂上 賢一

  青山学院大学理工学部

• 小川 武史

  青山学院大学理工学部

• 小林 圭史

  トーカロ(株)

• 寺谷 武馬

  トーカロ(株)

書誌事項

タイトル別名

• Evaluations of Mechanical Properties of DLC Film by Indentation Method and the Effect of Substrate
• インデンテーションホウ ニ ヨル DLC マク ノ リキガク トクセイ ノ ヒョウカ オヨビ キザイ ノ エイキョウ

抄録

This paper discussed the fracture mechanism of diamond like carbon (DLC) film subjected to contact loading. The DLC films with the thickness of about 12μm were deposited onto SUS304, SUS410 and WC-Co substrates by radio frequency (RF) plasma-based ion implantation method. Dual indenter method was applied to determine the stress-strain response of the films. Rockwell indentation tests with simultaneous monitoring of acoustic emission (AE) and corrosion potential fluctuation (CPF) techniques were also applied to the films to evaluate the static tensile strength. FEM analyses demonstrated the stress distribution under indentation testing and correlated the film fracture behavior with static strength of the films, which was assumed to be independent of the substrate materials based on the results of Raman spectra and indentation tests. Cyclic indentation tests were performed on the DLC film deposited onto WC-Co in order to evaluate the fatigue strength of the film. The cyclic fatigue was found to degrade the film strength compared to the static property.

収録刊行物

• 材料

  材料 58 (10), 833-840, 2009

  公益社団法人 日本材料学会

キーワード

• Diamond like carbon film
• Contact fracture
• Indentation
• Acoustic emission
• Corrosion potential fluctuation
• Cyclic fatigue

詳細情報

• CRID: 1390282680396599040
• NII論文ID: 130000133212
• NII書誌ID: AN00096175
• DOI: 10.2472/jsms.58.833
• ISSN: 18807488
• ISSN: 05145163
• NDL書誌ID: 10468266
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I10468266
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可