Submicroscale Flow Sensor Employing Suspended Hot Film with Carbon Nanotube Fins

• ITO Yohei

  Department of Aeronautics and Astronautics, Kyushu University

• HIGUCHI Taku

  Department of Aeronautics and Astronautics, Kyushu University

• TAKAHASHI Koji

  Department of Aeronautics and Astronautics, Kyushu University

Abstract

A submicroscale flow sensor has been developed that consists of a suspended hot film and carbon nanotube (CNT) fins. Flow measurement experiments, together with a theoretical model, revealed the advantages of the use of CNT fins. The suspended metal film reduces heat loss and the CNT fins enhance the heat transfer to the fluid flow. Herein, the working principle of the CNT fins is presented in detail, together with a description of the micro electro mechanical systems (MEMS) / nano electro mechanical systems (NEMS) techniques used to fabricate the sensor. The CNTs were deposited by a manipulation method that is based on dielectrophoresis.

Journal

• Journal of Thermal Science and Technology

  Journal of Thermal Science and Technology 5 (1), 51-60, 2010

  The Japan Society of Mechanical Engineers and The Heat Transfer Society of Japan

Keywords

• Submicroscale Flow Sensor
• CNT Fin
• MEMS
• NEMS
• Dielectrophoresis

Details

• CRID: 1390001205244347264
• NII Article ID: 130000258575
• DOI: 10.1299/jtst.5.51
• ISSN: 18805566
• Web Site: http://www.jstage.jst.go.jp/article/jtst/5/1/5_1_51/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed