Influences of Film Deposition Condition on Friction of Diamond-Like Carbon Film: A Theoretical Investigation

• Onodera Tasuku

  Department of Applied Chemistry, Graduate School of Engineering, Tohoku University

• Kuriaki Takanori

  Department of Chemical Engineering, Graduate School of Engineering, Tohoku University

• Bai Shandan

  Department of Chemical Engineering, Graduate School of Engineering, Tohoku University

• Nagumo Ryo

  New Industry Creation Hatchery Center, Tohoku University

• Miura Ryuji

  Department of Chemical Engineering, Graduate School of Engineering, Tohoku University

• Suzuki Ai

  New Industry Creation Hatchery Center, Tohoku University

• Tsuboi Hideyuki

  Department of Applied Chemistry, Graduate School of Engineering, Tohoku University

• Hatakeyama Nozomu

  Department of Applied Chemistry, Graduate School of Engineering, Tohoku University

• Endou Akira

  Department of Applied Chemistry, Graduate School of Engineering, Tohoku University

• Takaba Hiromitsu

  Department of Chemical Engineering, Graduate School of Engineering, Tohoku University

• Kubo Momoji

  Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku University

• Miyamoto Akira

  New Industry Creation Hatchery Center, Tohoku University Department of Applied Chemistry, Graduate School of Engineering, Tohoku University Department of Chemical Engineering, Graduate School of Engineering, Tohoku University

Bibliographic Information

Other Title

• Influence of film deposition condition on friction of diamond like carbon film: a theoretical investigation

Abstract

We theoretically investigated influences of film deposition condition on a friction of diamond-like carbon (DLC) film using our developed molecular dynamics method. The method can deal with chemical reactions on the basis of our original stochastic equation. DLC slab model was firstly constructed, and carbon atoms were deposited onto its surface with various kinetic energies (1, 10 and 30 eV) to mimic physical vapor deposition process. Lower sp³ carbon concentration and density were obtained for the 1 eV case and “subplantation” phenomenon was found for each model. The dynamical friction of the deposited DLC film/iron oxide combination was also simulated. The friction coefficient for the deposited film with kinetic energy of 1 eV was much lower than that of 10 and 30 eV cases due to the friction-induced structural change. The simulations provided us an important insight on DLC film preparation to achieve low friction regime.

Journal

• Tribology Online

  Tribology Online 5 (3), 173-180, 2010

  Japanese Society of Tribologists

Keywords

• diamond-like carbon
• physical vapor deposition
• dynamical friction
• chemical reaction
• molecular dynamics simulation

Details

• CRID: 1390001205269421440
• NII Article ID: 130000340577
• DOI: 10.2474/trol.5.173
• ISSN: 18812198
• ISSN: 1881218X
• Text Lang: en
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed