鏡面微細パターン形状を創成するレーザ微細加工

• 若林 正毅

  埼玉大学大学院

• 池野 順一

  埼玉大学大学院

書誌事項

タイトル別名

• Laser Micro-Fabrication to Form Mirror-Dimple Structure
• キョウメン ビサイ パターン ケイジョウ オ ソウセイ スル レーザ ビサイ カコウ

抄録

In this research, we proposed to achieve the mirror surface with a minute concave on the fused silica glass by a mew method. The surface enabled to control the curvature and the concave was sphere shaped. This method was to combine the laser machining and the chemical etching. The mechanism and the processing property of this method were verified from both experiments and simulations. As a result, we achieved to develop the better control of a micro shape and to create the mirror surface with a sphere shaped concave on the glass. The surface roughness was 2nmRa 11nmPV without chipping. In addition, processing multiple concaves changed the pattern of the surface to polygons such as square shapes and hexagonal shapes.

収録刊行物

• 精密工学会誌

  精密工学会誌 75 (6), 762-767, 2009

  公益社団法人 精密工学会

キーワード

• micro-fabrication
• functional surface
• micro-lens
• femtosecond laser
• etching
• mirror-concaves
• fused silica glass

詳細情報

• CRID: 1390282679773619456
• NII論文ID: 130000421685
• NII書誌ID: AN1003250X
• DOI: 10.2493/jjspe.75.762
• ISSN: 1882675X
• ISSN: 09120289
• NDL書誌ID: 10333272
• Web Site: http://id.ndl.go.jp/bib/10333272
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I10333272
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