書誌事項
- タイトル別名
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- Laser Induced Modification in Glasses by CW Laser Backside Irradiation (CW-LBI)
- CW レーザ ハイメン ショウシャホウ CW LBI ニ ヨル ガラス ノ ナイブ ヘンシツ ダイ3ポウ ガラス ナイブ エ ノ ハッキン ビリュウシ ノ ドウニュウ
- —Platinum Implantation into Glass—
- —ガラス内部への白金微粒子の導入—
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We demonstrate metal particle implantation technique into glass plate by continuous-wave (CW) laser beam illumination. Platinum film with the thickness of 1 μm was deposited on one side of Pyrex glass surface. The platinum film was radiated with a focused Ar ion laser beam from the other side of the glass. The laser power was set at 4.2 W. As a result, the platinum film was melted and a platinum particle with the diameter of 5 μm was implanted into the glass within 0.1 s after the laser illumination. The glass around the platinum particle heated by the laser illumination was softened, which enables the platinum particle migration in the glass. Interestingly, the particle moved more than 3 mm toward the light source with the speed of ∼ 0.2 mm/s. Energy dispersive X-ray spectroscopy (EDS) clarify that the particle was platinum, and silicon and oxygen, which were components of glass, were not detected. Trajectory of the platinum particle migration was modified and was able to be observed by an optical microscope. No platinum was detected in the trajectory of the platinum particle. The diameter of the modified zone was ∼ 10 μm.
収録刊行物
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- 精密工学会誌
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精密工学会誌 76 (5), 577-581, 2010
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390001204797025536
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- NII論文ID
- 130000421829
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL書誌ID
- 10699640
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- NDL
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