CWレーザ背面照射法(CW-LBI)によるガラスの内部変質(第4報):—白金微粒子導入により作製した変質部の評価— Laser Induced Modification in Glasses by CW Laser Backside Irradiation (CW-LBI):—A study on the Modification Induced by Platinum Particle Migration—
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We studied on the modification inside glass formed in the trajectory of a platinum particle implanted by laser illumination. A 1-μm-thick platinum film was deposited on the surface of Pyrex glass. The platinum film was irradiated by a focused Ar ion laser beam with a laser power of 4.2 W from the other side through the glass. As a result, platinum film was melted and a platinum particle with the diameter of 5 μm was implanted into the glass. The glass around the platinum particle heated by the laser illumination was softened, which enables the platinum particle migration in the glass. The threshold fluence for the platinum particle implantation was 0.1 MW/cm<sup>2</sup>. The speed of the platinum particle migration increased in the range from 0.1 mm/s to 10 mm/s with increasing laser fluence. Platinum was not detected and no clear composition change was detected in the trajectory of the platinum particle migration by energy dispersive X-ray spectroscopy. Etching of the modified zone formed cone shaped structures. The modified zone was bended and curved by changing the direction of the laser beam.
- Journal of the Japan Society for Precision Engineering
Journal of the Japan Society for Precision Engineering 76(6), 668-672, 2010
The Japan Society for Precision Engineering