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- SAWANO Hiroshi
- Precision and Intelligence Laboratory, Tokyo Institute of Technology
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- GOKAN Toshimichi
- Precision and Intelligence Laboratory, Tokyo Institute of Technology
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- YOSHIOKA Hayato
- Precision and Intelligence Laboratory, Tokyo Institute of Technology
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- SHINNO Hidenori
- Precision and Intelligence Laboratory, Tokyo Institute of Technology
抄録
Demands for measurement of three dimensional (3D) micro-geometries over a large area have recently increased in a variety of industries. In order to meet such requirements, it is necessary to realize a novel coordinate measuring machine (CMM) with a three-dimensional nano-motion system which has high resolution, high response and large measuring area. In this study, a three-dimensional nano-motion system was developed for a scanning probe microscopy (SPM) based CMM with nanometer spatial resolution. The system developed is composed of an X-Y planar nano-motion table system driven by voice coil motors (VCMs), a Z axis nano-motion system driven by a hybrid actuator and a probe holder that equipped with SPM probes. Performance evaluation results confirm that the system simultaneously achieves a long travel range, a high positioning resolution and a high stability.
収録刊行物
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- Journal of Advanced Mechanical Design, Systems, and Manufacturing
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Journal of Advanced Mechanical Design, Systems, and Manufacturing 4 (6), 1192-1200, 2010
一般社団法人 日本機械学会
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キーワード
詳細情報 詳細情報について
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- CRID
- 1390282680249759616
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- NII論文ID
- 130000428100
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- ISSN
- 18813054
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可